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Spherical aberration correction for subsurface dicing of silicon carbide

dc.rights.licenseCC-BY-NC-ND
dc.contributor.advisorOosten, Dries van
dc.contributor.authorHeiden, Annemarijn van der
dc.date.accessioned2025-02-24T14:01:24Z
dc.date.available2025-02-24T14:01:24Z
dc.date.issued2025
dc.identifier.urihttps://studenttheses.uu.nl/handle/20.500.12932/48543
dc.description.sponsorshipUtrecht University
dc.language.isoEN
dc.subjectIn deze scriptie wordt de invloed van sferische aberratie correctie op de schadedrempel voor subsurface laser induced damage van 4H-SiC onderzocht.
dc.titleSpherical aberration correction for subsurface dicing of silicon carbide
dc.type.contentBachelor Thesis
dc.rights.accessrightsOpen Access
dc.subject.courseuuNatuur- en Sterrenkunde
dc.thesis.id26871


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